HIGH-ASPECT-RATIO

作品数:21被引量:47H指数:4
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相关领域:电子电信更多>>
相关作者:朱军刘景全李建华陈迪张金娅更多>>
相关机构:上海华力微电子有限公司上海交通大学更多>>
相关期刊:《Nano-Micro Letters》《Chinese Optics Letters》《Journal of Materials Science & Technology》《Science China(Technological Sciences)》更多>>
相关基金:国家自然科学基金国家高技术研究发展计划中国航空科学基金中国科学院科研项目更多>>
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Surface-patterned chalcogenide glasses with high-aspect-ratio microstructures for long-wave infrared metalenses
《Opto-Electronic Science》2024年第10期1-13,共13页Zhaofeng Gu Yixiao Gao Kongsi Zhou Junyang Ge Chen Xu Lei Xu Mohsen Rahmani Ran Jiang Yimin Chen Zijun Liu Chenjie Gu Yaoguang Ma Jianrong Qiu Xiang Shen 
supported by National Natural Science Foundation of China(Grant No.62105172);Natural Science Foundation of Zhejiang Province(Grant No.LDT23F05015F05,LDT23F05011F05).
Multidimensional-engineering chalcogenide glasses is widely explored to construct various infrared photonic devices,with their surface as a key dimension for wavefront control.Here,we demonstrate direct patterning hig...
关键词:chalcogenide glasses long wave infrared metalens 
In-flight deformation measurement for high-aspect-ratio wing based on 3D speckle correlation
《High Technology Letters》2023年第3期257-268,共12页张兴国 HU Binghua WANG Yuanliang YAN Hui MA Xiaodong GE Quanbo 
Supported by the National Natural Science Foundation of China(No.62271400).
In order to get an effective solution of the in-flight wing deformation measurement for high-wing aircrafts with high-aspect-ratio,a method based on three-dimensional(3D)speckle correlation technique is proposed.First...
关键词:HIGH-ASPECT-RATIO three-dimensional(3D)speckle wing datum 
Control-oriented modeling of a high-aspect-ratio flying wing with coupled flight dynamics被引量:1
《Chinese Journal of Aeronautics》2023年第4期409-422,共14页Cong NIU Xiutian YAN Boyi CHEN 
co-supported by the Natural Science Founda-tion of Jiangsu Province,China(No.BK20200437);the National Natural Science Foundation of China(No.62103187);the Fundamental Research Funds for the Cen-tral Universities,China(No.NT2022025).
The flight-structural dynamics of a high-aspect-ratio wing challenge the flight control design.This paper develops a reduced model of coupled dynamics with stability consideration.The structural dynamics are formulate...
关键词:Flexible couplings Flexible wings Flight control systems Flight dynamics Sensitivity analysis 
High-aspect-ratio ZrC whiskers:Synthesis,growth mechanism and electromagnetic wave absorption properties被引量:1
《Journal of Materiomics》2023年第2期235-243,共9页Yao Guo Qiang Song Leilei Zhang Xu Yang Wei Li Fei Zhao Shouyang Zhang Lehua Qi 
supported by the National Natural Science Foundation of China(Grant Nos.51872234,51872232 and 52231004);the Joint Funds of the National Natural Science Foundation of China(Grant No.U21B2067);the Key R&D Program of Shaanxi Province(Grant Nos.2019ZDLGY04-02 and 2021ZDLGY14-04)and Natural Science Basic Research Plan in Shaanxi(2022JC-25).
Stealth materials with high dependability at elevated temperatures and outstanding mechanical properties are urgently needed for practical applications.As one-dimensional ultrahigh temperature ceramic(UHTC)materials,z...
关键词:ZrC whiskers MICROSTRUCTURE Carbothermal reduction Growth mechanism Electromagnetic wave absorption 
Spatiotemporal evolution of high-aspect-ratio filamentary trace in sapphire of picosecond pulse burst-mode for laser lift-off被引量:2
《Journal of Central South University》2022年第10期3304-3311,共8页SUN Wei-gao YAN Tian-yang WANG Yu-heng JI Ling-fei 
Project(51975017) supported by the National Natural Science Foundation of China;Project(KZ202110005012) supported by the Scientific Research Project of Beijing Educational Committee;China;Project(2018YFB1107500) supported by the National Key R&D Program of China。
The influence of the picosecond(ps) pulsed burst with a nanosecond scale of temporal separation(50 ns) on filamentary traces in sapphire substrate is investigated. The spatiotemporal evolution of the filamentary plasm...
关键词:picosecond laser filamentary plasma string BURST-MODE spatiotemporal evolution laser lift-off 
Improved multilevel storage capacity in Ge_(2)Sb_(2)Te_(5)-based phase-change memory using a high-aspect-ratio lateral structure被引量:2
《Science China Materials》2022年第10期2818-2825,共8页Ruizhe Zhao Mingze He Lun Wang Ziqi Chen Xiaomin Cheng Hao Tong Xiangshui Miao 
supported by the National Natural Science Foundation of China(62174065);the Key Research and Development Plan of Hubei Province(2020BAB007);Hubei Provincial Natural Science Foundation(2021CFA038);the support from Hubei Key Laboratory of Advanced Memories&Hubei Engineering Research Center on Microelectronics。
Further improvement of storage density is a key challenge for the application of phase-change memory(PCM)in storage-class memory.However,for PCM,storage density improvements include feature size scaling down and multi...
关键词:multilevel cell high aspect ratio NANOWIRES 3D phase-change memory Ge_(2)Sb_(2)Te_(5) 
一种干法刻蚀形成高深宽比CIS Deep-P Well IMP掩模的工艺方法的探究
《集成电路应用》2018年第7期37-41,共5页乔夫龙 耿金鹏 许鹏凯 
上海市经济和信息化委员会软件和集成电路产业发展专项基金(2015.150204)
为有效提升CIS(CMOS Image Sensor)器件的FWC(Full Well Capacity),需要将更高能量的DWP IMP注入到更小的space pattern区,相比较单一的光刻胶,引入TRL(TriLayer:PR/Si HM/SOC)并使用干刻方法能有效地形成了high-aspect-ratio(高深宽比,...
关键词:集成电路制造 干刻刻蚀 CMOS图像传感器 full WELL capacity 光素性能 HIGH-ASPECT-RATIO Deep P-WELL IMP图案掩模 高深宽比 Tri-Layer PR/SiHM/SOC 像素压缩 
High-aspect-ratio nanoimprint process chains
《Microsystems & Nanoengineering》2017年第1期221-232,共12页Víctor J.Cadarso Nachiappan Chidambaram Loïc Jacot-Descombes Helmut Schift 
This work is partially funded by the Swiss National Science Foundation(SNF)Ambizione project(no.PZ00P2_142511)granted to VJC.
Different methods capable of developing complex structures and building elements with high-aspect-ratio nanostructures combined with microstructures,which are of interest in nanophotonics,are presented.As originals fo...
关键词:cryo-etching direct 6 write laser lithography high aspect ratio MOULDING nanoimprint lithography ORMOCER photonic nanofences 2-photon polymerization 
Field-dependent spin waves in high-aspect-ratio singlecrystal ferromagnetic nanowires被引量:1
《Nano Research》2016年第5期1426-1433,共8页Semanti Pal Susmita Saha M. Venkata Kamalakar Anjan Barman 
We investigate the spin wave (SW) modes in high-aspect-ratio single-crystal ferromagnetic nanowires (FMNWs) using an all-optical time-resolved magnetooptical Kerr effect (TR-MOKE) microscope. The precessional ma...
Microstructure of Electrodeposited Cu Micro-cylinders in High-Aspect-Ratio Blind Holes and Crystallographic Texture of the Cu Overburden Film
《Journal of Materials Science & Technology》2016年第4期355-361,共7页Yazhou Zhang Guifu Ding Hong Wang Ping Cheng 
sponsored by Chinese National Science and Technology Major Project (No. 2011ZX02702-003)
Microstructure and texture of electrodeposited Cu micro-cylinders in the blind hole play a vitally im- portant role in the electrical and mechanical properties of the three-dimensional (3-D) IC (integrated circuit...
关键词:Cu micro-cylinder electrodepositionElectron back-scattered diffraction (EBSD)Crystallographic orientationCu overburden film 
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