Project supported by the National Natural Science Foundation of China(No.90607003).
Two closed-form formulae for the frequency-dependent resistance of rectangular cross-sectional interconnects are presented. The frequency-dependent resistance R (f) of a rectangular interconnect line or a intercon- ...
Project supported by the National Natural Science Foundation of China(No.90607003).
A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R(f) of a trapezoidal interconn...
Project supported by the National Natural Science Foundation of China(No.90607003).
A newΣΔmodulator architecture for thermal vacuum sensor ASICs is proposed.The micro-hotplate thermal vacuum sensor fabricated by surface-micrornachining technology can detect the gas pressure from 1 to 10;Pa. The am...
supported by the National Natural Science Foundation of China (No. 90607003).
An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate (MHP) and had been integrated with a rail to rail operat...