supported by the National Natural Science Foundation of China(No.51177053);the Specialized Research Fund for the Doctoral Program of Higher Education of China(No.2012CXZD0016);the Key Project of Department of Education of Guangdong Province(No.20124404110003);Guangzhou Science and Technology Project(No.201510010227)
To investigate a novel macro and micro driven linear piezoelectric motor composed of an ultrasonic motor with macro movement and a piezoelectric actuator with micro movement,a digital signal processing(DSP)based macro...