NANOLITHOGRAPHY

作品数:27被引量:36H指数:3
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相关领域:一般工业技术理学更多>>
相关期刊:《Nano-Micro Letters》《Science China Chemistry》《Chinese Physics B》《International Journal of Smart and Nano Materials》更多>>
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Two-photon nanolithography of micrometer scale diffractive neural network with cubical diffraction neurons at the visible wavelength
《Chinese Optics Letters》2024年第10期93-99,共7页Qi Wang Haoyi Yu Zihao Huang Min Gu Qiming Zhang 
supported by the National Key Research and Development Program of China(Nos.2021YFB2802000 and 2022YFB2804301);the Science and Technology Commission of Shanghai Municipality(No.21DZ1100500);the Shanghai Municipal Science and Technology Major Project,the Shanghai Frontiers Science Center Program(2021–2025 No.20);the National Natural Science Foundation of China(Nos.61975123,62305219,and 62205208);the Shanghai Natural Science Foundation(No.23ZR1443200);the China Postdoctoral Science Foundation(Nos.2022M712138 and 2021M702192);the Shanghai Super Postdoctoral Incentive Scheme(Nos.5B22904002 and 5B22904006)。
Free-space diffractive neural networks(DNNs)have been an intense research topic in machine learning for image recognition and encryption due to their high speed,lower power consumption,and high neuron density.Recent a...
关键词:optical neural networks diffractive neural networks two-photon nanolithography 
Alkenyl-type ligands functionalized tin-lanthanide oxo nanoclusters as molecular lithography resists被引量:2
《Science China Chemistry》2023年第6期1731-1736,共6页Fang-Fang Liu Di Wang Guang-Hui Chen Yang Qiao Feng Luo Jian Zhang Lei Zhang 
supported by the National Natural Science Foundation of China(21922111,91961108,21935010,22271284)。
Both the cluster chemistry of tin and lanthanides have attracted extensive research interest,showing wide applications in catalysis,magnetism,luminescence,and lithography.However,their fusion into heterometallic Sn-Ln...
关键词:cluster compounds tin LANTHANIDES NANOLITHOGRAPHY PHOTORESISTS 
3D printed fiber-optic nanomechanical bioprobe被引量:8
《International Journal of Extreme Manufacturing》2023年第1期222-234,共13页Mengqiang Zou Changrui Liao Yanping Chen Lei Xu Shuo Tang Gaixia Xu Ke Ma Jiangtao Zhou Zhihao Cai Bozhe Li Cong Zhao Zhourui Xu Yuanyuan Shen Shen Liu Ying Wang Zongsong Gan Hao Wang Xuming Zhang Sandor Kasas Yiping Wang 
supported by the National Natural Science Foundation of China(NSFC)(62122057,62075136,62175165);Natural Science Foundation of Guangdong Province(2022B1515120061,2019B1515120042);Science and Technology Innovation Commission of Shenzhen(RCYX20200714114524139,JCYJ20200109114001806).
Ultrasensitive nanomechanical instruments,e.g.atomic force microscopy(AFM),can be used to perform delicate biomechanical measurements and reveal the complex mechanical environment of biological processes.However,these...
关键词:two-photon polymerization nanolithography optical fiber sensor nanomechanical probe stiffness tunable microcantilever BIOSENSOR 
High-fidelity transfer of area-selective atomic layer deposition grown HfO_(2)through DNA origami-assisted nanolithography
《Nano Research》2022年第6期5687-5694,共8页Xiaowan Yuan Daiqin Xiao Wei Yao Zhihao Zhang Lin Yang Liyuan Zhang Yibo Zeng Jiaqi Liao Shanxiong Luo Chonghao Li Hong Chen Xiangmeng Qu 
supported by the National Key R&D Program of China(No.2019YFA0905800);the National Natural Science Foundation of China(No.21705048);Guangdong Basic and Applied Basic Research Foundation(No.2021A1515012333);Natural Science Foundation of Jiangxi Province(No.20192ACBL20046);the Fundamental Research Funds for the Central Universities(No.20720200004);the Key Project of College Youth Natural Fund of Fujian Province(No.JZ160404);the Key Laboratory of Sensing Technology and Biomedical Instruments of Guangdong Province(No.2020B1212060077);support from Qingdao XINO Tech company.Thanks to Yange Wang for his help in AFM scanning。
DNA origami-assisted nanolithography(DOANL)for fabricating custom-designed nanomaterials through pattern transfer from DNA origami to different substrates materials are presented.However,the pattern's integrity and re...
关键词:DNA origami masks DNA Origami-assisted nanolithography HfO_(2) area-selective atomic layer deposition 
Applications of optically and electrically driven nanoscale bowtie antennas
《Opto-Electronic Science》2022年第4期11-21,共11页Zhongjun Jiang Yingjian Liu Liang Wang 
This work is supported by National Key Research and Development Program of China(2018YFB2200900);the Key R&D Program of Anhui(Grant No.202004A05020077);National Natural Science Foundation of China(61775206).The nanofabrication was carried out at the USTC Center for Micro and Nanoscale Research and Fabrication.We also thank Prof.Xianfan Xu of Purdue University for his warm-hearted discussion.
Optical antennas play an important role in optical field manipulation.Among them,nanoscale bowtie antennas have been extensively studied for its high confinement and enhancement.In this mini-review,we start with a bri...
关键词:bowtie antenna near-field imaging NANOLITHOGRAPHY NONLINEAR nanolaser inelastic tunneling 
Non-alkyl tin-oxo clusters as new-type patterning materials for nanolithography被引量:6
《Science China Chemistry》2022年第1期114-119,共6页Di Wang Xiaofeng Yi Lei Zhang 
supported by the National Natural Science Foundation of China(21922111,91961108)。
Nanolithography plays crucial roles in the miniaturization of dense integrated circuit,which extremely depends on innovative resist materials.Recently,metal-containing resists have been explored due to their higher sh...
关键词:non-alkyl tin-oxo clusters NANOLITHOGRAPHY ligands effect EBL patterning materials 
High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens被引量:1
《Engineering》2021年第11期1623-1630,共8页Yueqiang Hu Ling Li Rong Wang Jian Song Hongdong Wang Huigao Duan Jiaxin Ji Yonggang Meng 
We acknowledge the financial support by the National Natural Science Foundation of China(91623105 and 52005175);Natural Science Foundation of Hunan Province of China(2020JJ5059).
Simple and efficient nanofabrication technology with low cost and high flexibility is indispensable for fundamental nanoscale research and prototyping.Lithography in the near field using the surface plasmon polariton(...
关键词:Nanofabrication Surface plasmon polariton LITHOGRAPHY Plasmonic flying head Plasmonic lens 
Self-aligned fiber-based dual-beam source for STED nanolithography被引量:2
《Chinese Optics Letters》2021年第7期82-86,共5页Jian Chen Guoliang Chen Qiwen Zhan 
supported by the National Natural Science Foundation of China (No.61805142);the Shanghai Science and Technology Committee (No.19060502500);the Natural Science Foundation of Shanghai (No.20ZR1437600)。
A fiber-based source that can be exploited in a stimulated emission depletion(STED) inspired nanolithography setup is presented.Such a source maintains the excitation beam pulse, generates a ring-shaped depletion beam...
关键词:NANOLITHOGRAPHY vortex fiber direct laser writing STED controlled fabrication 
Hybrid multi-chip assembly of optical communication engines by in situ 3D nanolithography被引量:12
《Light(Science & Applications)》2020年第1期1340-1350,共11页Matthias Blaicher Muhammad Rodlin Billah Juned Kemal Tobias Hoose Pablo Marin-Palomo Andreas Hofmann Yasar Kutuvantavida Clemens Kieninger Philipp-Immanuel Dietrich Matthias Lauermann Stefan Wolf Ute Troppenz Martin Moehrle Florian Merget Sebastian Skacel Jeremy Witzens Sebastian Randel Wolfgang Freude Christian Koos 
supported by the Bundesministerium fur Bildung und Forschung(BMBF)Projects PHOIBOS(Grant 13N1257)and SPIDER(Grant 01DR18014A);by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany´s Excellence Strategy via the Excellence Cluster 3D Matter Made to Order(EXC-2082/1-390761711);by the Helmholtz International Research School for Teratronics(HIRST);by the European Research Council(ERC Consolidator Grant‘TeraSHAPE’,#773248);by the H2020 Photonic Packaging Pilot Line PIXAPP(#731954);by the EU-FP7 project BigPipes;by the Alfried Krupp von Bohlen und Halbach Foundation;by the Karlsruhe Nano-Micro Facility(KNMF);by the Deutsche Forschungsgemeinschaft(DFG)through CRC#1173(‘WavePheonmena’).
Three-dimensional(3D)nano-printing of freeform optical waveguides,also referred to as photonic wire bonding,allows for efficient coupling between photonic chips and can greatly simplify optical system assembly.As a ke...
关键词:communication LITHOGRAPHY BONDING 
Tape nanolithography:a rapid and simple method for fabricating flexible,wearable nanophotonic devices被引量:2
《Microsystems & Nanoengineering》2018年第1期105-116,共12页Qiugu Wang Weikun Han Yifei Wang Meng Lu Liang Dong 
This work was supported in part by the U.S.National Science Foundation under Grant No.ECCS-1711839;in part by the Iowa State University’s Plant Sciences Institute through the Faculty Scholar Program.
This paper describes a tape nanolithography method for the rapid and economical manufacturing of flexible,wearable nanophotonic devices.This method involves the soft lithography of a donor substrate with air-void nano...
关键词:WEAR TRANSFERRED METHOD 
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