SPUTTER

作品数：48被引量：41H指数：4
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相关机构：北京有色金属研究总院中央研究院北京大学中建材凯盛机器人(上海)有限公司更多>>
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Wafer‑Scale Ag_(2)S‑Based Memristive Crossbar Arrays with Ultra‑Low Switching‑Energies Reaching Biological Synapses
《Nano-Micro Letters》2025年第3期328-339,共12页Yuan Zhu Tomas Nyberg Leif Nyholm Daniel Primetzhofer Xun Shi Zhen Zhang 
supported by the Swedish Strategic Research Foundation(SSF FFL15-0174 to Zhen Zhang);the Swedish Research Council(VR 2018-06030 and 2019-04690 to Zhen Zhang);the Wallenberg Academy Fellow Extension Program(KAW 2020-0190 to Zhen Zhang);the Olle Engkvist Foundation(Postdoc grant 214-0322 to Zhen Zhang).
Memristive crossbar arrays(MCAs)offer parallel data storage and processing for energy-efficient neuromorphic computing.However,most wafer-scale MCAs that are compatible with complementary metal-oxide-semiconductor(CMO...
关键词：Wafer-scale Ag_(2)S films Reactive sputter Silver nucleation Ag^(+)migration Energy-efficient neuromorphic computing 
Current-collapse suppression and leakage-current decrease in AlGaN/GaN HEMT by sputter-TaN gate-dielectric layer
《Journal of Semiconductors》2024年第7期70-75,共6页Bosen Liu Guohao Yu Huimin Jia Jingyuan Zhu Jiaan Zhou Yu Li Bingliang Zhang Zhongkai Du Bohan Guo Lu Wang Qizhi Huang Leifeng Jiang Zhongming Zeng Zhipeng Wei Baoshun Zhang 
supported by the National Natural Science Foundation of China(Grant No.1237310);The Youth Innovation Promotion Association of the Chinese Academy of Sciences(Grant No.2020321);the National Natural Science Foundation of China(Grant No.92163204);The Key Research and Development Program of Jiangsu Province(Grant No.BE2022057-1)。
In this paper, we explore the electrical characteristics of high-electron-mobility transistors(HEMTs) using a TaN/AlGaN/GaN metal insulating semiconductor(MIS) structure. The high-resistance tantalum nitride(TaN) film...
关键词：AlGaN/GaN MIS HEMTs gate dielectric layer DEPLETION-MODE gate reliability I_(on)/I_(off)ratio 
Parametric study on controllable growth of SrZrS_(3)thin films with good conductivity for photodetectors被引量：1
《Nano Research》2023年第5期7867-7873,共7页Yurun Liang Yuewen Zhang Jie Xu Jingli Ma Huifang Jiang Xin Li Baolin Zhang Xu Chen Yongtao Tian Yanbing Han Zhifeng Shi 
the National Natural Science Foundation of China(Nos.62104215 and 12074347);China Postdoctoral Science Foundation(Nos.2020M672257 and 2020TQ0286);Natural Science Foundation of Henan Province of China(No.202300410439);Department of Science and Technology of Henan Province of China(No.202102210214).
SrZrS_(3)is a promising chalcogenide perovskite with unique advantages including high abundance of consisting elements,high chemical stability,strong light absorption above its direct band gap,excellent carrier transp...
关键词：chalcogenide perovskite thin film SrZrS_(3) SPUTTER PHOTODETECTOR 
Sputter Deposited Carbon Material based Fabry-Perot Sensor and Downhole Application
《Journal of Wuhan University of Technology(Materials Science)》2022年第6期1143-1149,共7页WANG Yingying LIU Xiaohui CHEN Xiaoan SUN Zhihui ZHAO Qingchao 
by the National Natural Science Foundation of China(No.61605101);the Natural Fund of Shandong Province(Nos.ZR2021MF127 and ZR2020LLZ010);the Peixin Fund of Qilu University of Technology(No.2022PX074)。
To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we emplo...
关键词：quartz substrate Fabry-Perot sensor vacuum sputtering carbon coating material 
Significant performance enhancement of all-inorganic CsPbBr_(3)perovskite solar cells enabled by Nb-doped SnO_(2)as effective electron transport layer被引量：1
《Energy & Environmental Materials》2021年第4期671-680,共10页Ruxin Guo Yan Zhao Yongshang Zhang Quanrong Deng Yonglong Shen Wei Zhang Guosheng Shao 
supported by the National Natural Science Foundation of China(Nos.51602290,91233101,11174256);the Fundamental Research Program from the Ministry of Science and Technology of China(No.2014CB31704);Project funded by China Postdoctoral Science Foundation(No.2016M592310);the financial support from EPSRC New Investigator Award(2018;EP/R043272/1);H2020-EU grant(2018;CORNET 760949)
All-inorganic CsPbBr_(3)-based perovskite solar cells(PSCs)have attracted great attention because of their high chemical and thermal stabilities in ambient air.However,the short-circuit current density(J_(sc))of CsPbB...
关键词：SPUTTER Nb-doped SnO_(2) perovskite solar cell short-circuit current density long-term stability 
Preparation of AlN film grown on sputter-deposited and annealed AlN buffer layer via HVPE被引量：1
《Chinese Physics B》2021年第3期430-435,共6页Di-Di Li Jing-Jing Chen Xu-Jun Su Jun Huang Mu-Tong Niu Jin-Tong Xu Ke Xu 
Project supported by the National Key Technologies R&D Program of China(Grant No.2017YFB0404100);Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences.
AlN films grown on sputter-deposited and annealed AlN buffer layer by high temperature hydride vapor phase epitaxy(HVPE)have been fabricated and structurally characterized.The crystalline quality and surface morpholog...
关键词：hydride vapor phase epitaxy(HVPE) ALN threading dislocation(TD) SPUTTER-DEPOSITION 
Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with various sputtering conditions被引量：1
《Journal of Semiconductors》2020年第12期94-100,共7页Wen Gu Zhibin Liu Yanan Guo Xiaodong Wang Xiaolong Jia Xingfang Liu Yiping Zeng Junxi Wang Jinmin Li Jianchang Yan 
This work was supported by the National Key R&D Program of China(Nos.2016YFB0400800 and 2017YFB0404202);the National Natural Sciences Foundation of China(Grant Nos.61527814,61674147,61904176,U1505253);Beijing Nova Program Z181100006218007;Youth Innovation Promotion Association CAS 2017157.
High-quality AlN/sapphire templates were fabricated by the combination of sputtering and high-temperature(HT)annealing.The influence of sputtering parameters including nitrogen flux,radio frequency power,and substrate...
关键词：SPUTTER ANNEALING ALN dislocation density 
Deciphering deformation mechanisms of hierarchical dual-phase CrCoNi coatings被引量：4
《Journal of Materials Science & Technology》2020年第4期7-13,共7页S.J.Tsianikas Y.Chen Z.Xie 
financially supported by the Australian Research Council Discovery Projects Grant (DP160104632);by an Australian Government Research Training Program (RTP) Scholarship.
Hierarchical Cr Co Ni medium entropy alloy(MEA)thin films with a dual-phase face-centred cubic(FCC)and hexagonal closed-packed(HCP)nanostructure were prepared on M2 steel substrates by closed field unbalanced magnetro...
关键词：Medium entropy alloys SPUTTER deposition GRAIN REFINEMENT SHEAR BANDING Phase transformation 
Atomically flat surface preparation for surface-sensitive technologies
《Chinese Physics B》2020年第2期438-441,共4页Cen-Yao Tang Zhi-Cheng Rao Qian-Qian Yuan Shang-Jie Tian Hang Li Yao-Bo Huang He-Chang Lei Shao-Chun Li Tian Qian Yu-Jie Sun Hong Ding 
Project supported by the Science Fund from the Ministry of Science and Technology of China(Grant Nos.2016YFA0401000,2016YFA0300600,2016YFA0302400,2016YFA0300504,and 2017YFA0302901);the National Natural Science Foundation of China(Grant Nos.11622435,U1832202,11474340,11822412,11574371,11674369,11574394,11774423,and 11774399);the Fund from the Chinese Academy of Sciences(Grant Nos.QYZDB-SSW-SLH043,XDB07000000,and XDB28000000);the Science Challenge Project,China(Grant No.TZ2016004);the K C Wong Education Foundation,China(Grant No.GJTD-2018-01);the Beijing Natural Science Foundation,China(Grant No.Z180008),the Fund from the Beijing Municipal Science and Technology Commission,China(Grant Nos.Z171100002017018,Z181100004218005,and Z181100004218001);the Fundamental Research Funds for the Central Universities,China,and the Research Funds of Renmin University of China(Grant Nos.15XNLQ07,18XNLG14,and 19XNLG17).
Surface-sensitive measurements are crucial to many types of researches in condensed matter physics.However,it is difficult to obtain atomically flat surfaces of many single crystals by the commonly used mechanical cle...
关键词：grind-polish-sputter-anneal atomically FLAT single crystal SURFACE TOPOLOGICAL materials 
Stress, Roughness and Reflectivity Properties of Sputter-Deposited B4C Coatings for X-Ray Mirrors被引量：2
《Chinese Physics Letters》2019年第12期17-21,共5页Jia-Li Wu Run-Ze Qi Qiu-Shi Huang Yu-Fei Feng Zhan-Shan Wang Zi-Hua Xin 
Supported by the National Key R&D Program of China under Grant No 2016YFA0401304;the National Natural Science Foundation of China under Grant Nos 61621001,U1732268 and 11875203;the Shanghai Municipal Science and Technology Major Project under Grant No 2017SHZDZX02
Boron carbide(B4C)coatings have high reflectivity and are widely used as mirrors for free-electron lasers in the x-ray range.However,B4C coatings fabricated by direct-current magnetron sputtering show a strong compres...
关键词：coating STRESS CARBIDE 
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