国家自然科学基金(50472068)

作品数:16被引量:35H指数:4
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相关作者:胡小波徐现刚李娟蒋民华陈秀芳更多>>
相关机构:山东大学更多>>
相关期刊:《Journal of Rare Earths》《Chinese Optics Letters》《Chinese Journal of Structural Chemistry》《人工晶体学报》更多>>
相关主题:6H-SICCMP单晶生长SICROUGHNESS更多>>
相关领域:理学电子电信金属学及工艺更多>>
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Etching Effect on CMP of Different GaN Layers
《稀有金属材料与工程》2011年第S3期276-280,共5页Siche Dietmar Rost Hans-Joachim Schulz Tobias Albrecht Martin 
National Natural Science Foundation of China (50472068, 50721002);National "863" High Technology Research and Development Program of China (2006AA03A145, 2007AA03Z405);National Basic Research Program of China (2009CB930503);The Cultivation Fund of the Key Scientific and Technical Innovation Project, Ministry of Education of China (707039)
Chemical mechanical polishing (CMP) was used to etch various GaN materials, such as GaN layers on sapphire and silicon carbide substrates grown by metal-organic chemical vapor deposition and thick GaN layers grown by ...
关键词:SURFACE ETCH PITS CMP GAN 
Influence of the upper waveguide layer thickness on optical field in asymmetric heterostructure quantum well laser diode被引量:2
《Chinese Optics Letters》2010年第5期493-495,共3页李沛旭 蒋锴 李树强 夏伟 张新 汤庆敏 任忠祥 徐现刚 
supported by the National Natural Science Foundation of China(No.50472068);the Program for New Century Excellent Talents in University.
Asymmetric broad-waveguide separate-confinement heterostructure(BW-SCH) quantum well(QW) laser diode emitting at 808 nm is analyzed and designed theoretically.The dependence of the optical field distribution, vert...
关键词:Semiconductor quantum wells WAVEGUIDES 
MOCVD growth of AlGaInP/GaInP quantum well laser diode with asymmetric cladding structure for high power applications被引量:2
《Chinese Optics Letters》2009年第6期489-491,共3页李沛旭 王翎 李树强 夏伟 张新 汤庆敏 任忠祥 徐现刚 
supported by the National Natural Science Foundation of China (No.50472068);the Program for New Century Excellent Talents in University
In order to improve the characteristics of the general broad-waveguide 808-nm semiconductor laser diode (LD), we design a new type quantum well LD with an asymmetric cladding structure. The structure is grown by met...
关键词:MOCVD growth of AlGaInP/GaInP quantum well laser diode with asymmetric cladding structure for high power applications well high 
透射电子显微术和高分辨X射线衍射技术研究AlN单晶生长习性被引量:5
《人工晶体学报》2008年第5期1117-1120,共4页李娟 胡小波 高玉强 王翎 徐现刚 
国家自然科学基金(No.50472068);教育部"新世纪优秀人才支持计划"资助项目;国家留学基金委;山东省自然科学基金资助
采用透射电子显微术和高分辨X射线衍射技术对氮化硼坩埚中自发成核的AlN单晶生长习性进行了研究。结果表明,在低温下,AlN单晶显露面为(0001)面,随着温度的升高,AlN单晶显露面转化为(112-0)面。沟槽结构是高温下得到的AlN单晶共有的显著...
关键词:透射电子显微术 高分辨X射线衍射仪 AlN单晶 
Optical Absorption Measurements on Nitrogen-doped 6H-SiC Single Crystals被引量:1
《Chinese Journal of Structural Chemistry》2007年第10期1171-1174,共4页姜守振 陈秀芳 徐现刚 胡小波 宁丽娜 王英民 李娟 蒋民华 
the National Natural Science Foundation of China (No. 50472068);Natural Science Foundation of Shandong Province,(No. Y2006F15);Shandong Provincial Significant Science and Technology Attack Project (No. 2005GG2107001);Shandong Provincial Independent Innovation Significant Science and Technology Special Plan (No. 2006GG1103046)
6H-SiC bulk crystals have been prepared by sublimation method in an inductively heated growth reactor. The effect of nitrogen doping on absorption for 6H-SiC was investigated. The absorption measurement based on optic...
关键词:6H-SIC SUBSTRATE nitrogen doping absorption measurement 
Comparison of Different Crucible Materials for the Growth of AlN Crystals
《Chinese Journal of Structural Chemistry》2007年第10期1203-1207,共5页李娟 胡小波 王英民 宁丽娜 姜守振 陈秀芳 徐现刚 王继扬 蒋民华 
the National Natural Science Foundation of China (No. 50472068);the Program for New Century Excellent Talents in University
Choice of crucible material is a key issue during the growth of AIN crystal. The stabilities at high temperature and life-spans of boron nitride (BN) crucible, tantalum (Ta) crucible and tungsten (W) crucible we...
关键词:aluminum nitride CRUCIBLE SUBLIMATION 
6H-SiC衬底片的表面处理(英文)被引量:5
《人工晶体学报》2007年第5期962-966,共5页陈秀芳 徐现刚 胡小波 杨光 宁丽娜 王英民 李娟 姜守振 蒋民华 
This work supported by the National Natural Science Foundation of China (No.50472068);Programfor New Century Excellent Talents in University
相比于蓝宝石,6H-SiC是制作GaN高功率器件更有前途的衬底。本文研究了表面处理如研磨、化学机械抛光对6H-SiC衬底表面特性的影响。用显微镜、原子力显微镜、拉曼光谱、卢瑟福背散射谱表征了衬底表面。结果表明经过两步化学机械抛光后提...
关键词:6H-SIC 衬底 表面处理 研磨 化学机械抛光 
3英寸6H-SiC单晶的生长被引量:1
《人工晶体学报》2007年第3期717-718,共2页王英民 宁丽娜 陈秀芳 彭燕 高玉强 胡小波 徐现刚 蒋民华 
国家863计划(2006AA03A145);国家自然科学基金(No.50472068);山东省重大科技专项计划(2006GG1103046)支持项目
关键词:6H-SiC单晶 单晶生长 宽带隙半导体材料 蓝色发光二极管 大功率电子器件 Cree公司 电学性质 衬底材料 
Surface Polishing of 6H-SiC Substrates被引量:5
《Journal of Materials Science & Technology》2007年第3期430-432,共3页Xiufang CHEN Xiangang XU Juan LI Shouzhen JIANG Lina NING Yingmin WANG Deying MA Xiaobo HU Minhua JIANG 
supported by the National Natural Science Foundation of China(Grant No.60025409 and No.50472068);supported by the National High-Tech Research and Development Program of China(863 Program,Grant No.2001AA311080).
The surface polishing for silicon carbide (SIC) substrates was investigated and results were presented for mechanical polishing (MP) and chemo-mechanical polishing (CMP). High quality surfaces were obtained afte...
关键词:SIC Chemo-mechanical polishing (CMP) ROUGHNESS Subsurface damage 
Relaxation of residual stresses in SiC wafers by annealing被引量:1
《Rare Metals》2006年第6期704-708,共5页CHEN Xiufang XU Xiangang HU Xiaobo LI Juan WANG Yingmin JIANG Shouzhen ZHANG Kai 
This work was financially supported by the National Natural Science Foundation of China (Nos. 60025409 and 50472068) and by the National "863" High Technology Plan (No. 2001AA311080).
Residual stresses in SiC wafers, which were introduced during production processes including sawing, lapping, mechanical polishing (MP), and chemical-mechanical polishing (CMP), were evaluated in terms of changes ...
关键词:SIC ANNEALING residual stress mechanical polishing chemical-mechanical polishing 
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