Project supported by the Natural Science Foundation of Beijing,China(Grant No.4072007);the National Natural Science Foundation of China(Grant Nos.60876006 and 60376007)
Silver nanoparticle thin films with different average particle diameters are grown on silicon substrates. Boron nitride thin films are then deposited on the silver nanoparticle interlayers by radio frequency (RF) ma...
supported by the National Natural Science Foundation of China (Grant Nos. 60876006 and 60376007);the Natural Science Foundation of Beijing, China (Grant No. 4072007);the Scientific Research Program of Beijing Municipal Commission of Education, China (Grant No.KM200910005018);the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry, China;the Funding Project for Academic Human Resources Development in Institutions of Higher Learning under the Jurisdiction of Beijing Municipality
Cubic boron nitride (c-BN) thin films are deposited on p-type Si wafers using radio frequency (RF) sputtering and then doped by implanting S ions. Wile implantation energy of the ions is 19 keV, and the implantati...