National Natural Science Foundation of China(60908023,11075143/A050609);Key Laboratory of Ultra-Precision M achining Technology Foundation of CAEP(ZZ15003)~~
supported by National Natural Science Foundation of China(No.60908023);the Open Project of State Key Laboratory Cultivation Base for Nonmetal Composites and Functional Materials of China(No.Ilzxfkl9)
Diamond films have great potential for micro-electro-mechanical system(MEMS) application.For device realization,precise patterning of diamond films at micrometer scale is indispensable.In this paper,simple and facil...