The influence of characteristics’ measurement sequence on total ionizing dose effect in partially-depleted SOI nMOSFET is comprehensively studied. We find that measuring the front-gate curves has no influence on tota...
supported by the National High Technology Research and Development Program of China(Grant No.SS2015AA010601);the National Natural Science Foundation of China(Grant Nos.61176091 and 61306129);the Opening Project of Key Laboratory of Microelectronics Devices&Integrated Technology,Institute of Micro Electronics of Chinese Academy of Sciences
The thickness effect of the TiN capping layer on the time dependent dielectric breakdown(TDDB) characteristic of ultra-thin EOT high-k metal gate NMOSFET is investigated in this paper.Based on experimental results,i...
Project supported by the National Natural Science Foundation of China(Grant Nos.61334002,61106106,and 61474091);the New Experiment Development Funds for Xidian University,China(Grant No.SY1434);the Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry,China(Grant No.JY0600132501)
In this paper, the principle of discharge-based pulsed I–V technique is introduced. By using it, the energy and spatial distributions of electron traps within the 4-nm HfO_2 layer have been extracted. Two peaks are o...
Project supported by the National Natural Science Foundation of China(Grant No.61306131);the Research Project of Education Department of Shaanxi Province,China(Grant No.2013JK1095)
Drain-modulated generation current IDMGinduced by interface traps in an n-type metal-oxide-semiconductor fieldeffect transistor(n MOSFET) is investigated. The formation of IDMGascribes to the change of the Si surfac...
supported by the National Natural Science Foundation of China(Grant No.61376109);the Opening Project of National Key Laboratory of Science and Technology on Reliability Physics and Application Technology of Electrical Component,China(Grant No.ZHD201202)
Although hot carriers induced degradation of NMOSFETs has been studied for decades, the role of hot electron in this process is still debated. In this paper, the additional substrate hot electrons have been intentiona...
Project supported by the National Basic Research Program of China(Grant No.2011CBA00606);the National Natural Science Foundation of China(Grant No.61106106)
The degradation produced by hot carrier (HC) in ultra-deep sub-micron n-channel metal oxide semiconductor field effect transistor (nMOSFET) has been analyzed in this paper. The generation of negatively charged int...
Project supported by the Beijing Natural Science Foundation,China(Grant No.4123106);the National Science and Technology Major Projects of the Ministry of Science and Technology of China(Grant No.2009ZX02035)
A gate-last process for fabricating HfSiON/TaN n-channel metal-oxide-semiconductor-field-effect transistors (NMOSFETs) is presented. In the process, a HfSiON gate dielectric with an equivalent oxide thickness of 10 ...
Project supported by the Shaanxi Provincial Research Project of Education Department,China (Grant No. 11JK0902);the Xi’an Municipal Applied Materials Innovation Fund,China (Grant No. XA-AM-201012)
The degradation of transconductance (G) of a gate-modulated generation current IGD in a LDD nMOSFET is investigated. The G curve shifts rightward under the single electron-injection-stress (EIS). The trapped elect...
Deep submicron n-channel metal-oxide-semiconductor field-effect transistors (NMOSFETs) with shallow trench isolation (STI) are exposed to ionizing dose radiation under different bias conditions. The total ionizing...
Project supported by the National Natural Science Foundation of China(Grant Nos.60976068 and 60936005);Cultivation Fund of the Key Scientific and Technical Innovation Project,Ministry of Education of China(Grant No.708083);Fundamental Research Funds for the Central Universities(Grant No.200807010010)
This paper investigates the electrical characteristics and temperature distribution of strained Si/SiGe n-type metal oxide semiconductor field effect transistor (nMOSFET) fabricated on silicon-on-aluminum nitride (...