Project supported by the National Natural Science Foundation of China (Nos. 50836004,50905139,and 90923001);the Fundamental Research Funds for the Central Universities (No. xjj20100140);the Science and Technology Research Project of Shaanxi Province (No. 2012KJXX-01);the Program of Changjiang Scholars and Innovative Research Team in University (No. IRT1033);the 111 Program (No. B12016),China
A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequ...
supported by the Natural Science Foundation of China(Grant No.90923001);the International Science&Technology Cooperation Program of China(Grant Nos.2010DFB13640 and 2011DFA51880);the Shaanxi Province International Collaboration Program(Grant Nos.2009KW-12 and 2010KW-09).
Ferroelectric Pb(Zr_(0.52)Ti_(0.48))O_(3)(PZT)thick films with highly(100)preferential orientation have been prepared by chemical solution deposition process on Pt/Ti/SiO_(2)/(100)Si substrates and pyrolyzed at 350℃-...
the support from the Natural Science Foundation of China(Grant No.90923001);the International Science and Technology Cooperation Program of China(Grant Nos.2010DFB13640 and 2011DFA51880);the Shaanxi Province International Collaboration Program(Grant Nos.2009KW-12 and 2010KW-09);the Fundamental Research Funds for the Central Universities(Grant No.0105-08143078);supported by the research grant,SERC of A*STAR(Agency for Science,Technology and Research),Singapore(No.0921150112)。
Lead-free ferroelectric K_(0.5)Na_(0.5)NbO_(3)(KNN)films with different thicknesses were prepared by polyvinlypyrrolidone(PVP)-modified chemical solution deposition(CSD)method.Their residual stresses were studied with...