Supported by the National Natural Science Foundation of China(12027805,62171136,62174166,U2241219);the Science and Technology Commission of Shanghai Municipality(2019SHZDZX01,22JC1402902);the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB43010200)。
Supported by the Shanghai Pujiang Program(18PJ1410700);Key Laboratory of Defense Technology Funding of Chinese Academy of Sciences(CXJJ-20S004);Innovation Program of Shanghai Institute of Technical Physics,Chinese Academy of Sciences(CX-268)。
提出了一种基于0.35μm高压CMOS工艺的线性雪崩光电二极管(Avalanche Photodiode,APD)。APD采用了横向分布的吸收区-电荷区-倍增区分离(Separate Absorption,Charge and Multiplication,SACM)的结构设计。横向SACM结构采用了高压CMOS工...
Supported by the National High Technology Research and Development Program of China(2018YFB2003305);the Key R&D Program of Jiangsu Province(BE2018005);the Science and Technology Service Network Initiative of the Chinese Academy of Sciences(KFJ-STS-ZDTP-086);the Support From SINANO(Y8AAQ11003);Natural Science Foundation of Jiangsu Province(BK20180252)。