supported by the GuangdongMajor Project of Basic and Applied Basic Research(2023B0303000012);Guangdong Science Foundation for Distinguished Young Scholars(2022B1515020073);Shenzhen Science and Technology Program(JCYJ20220818102809020).
In this study,a galliumnitride(GaN)substrate and its 15μmepitaxial layer were entirely grown by adopting the hydride vapor phase epitaxy(HVPE)technique.To enhance the breakdown voltage(VBR)of vertical GaN-on-GaN Scho...