GAAS/SI

作品数:55被引量:22H指数:2
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相关领域:电子电信理学更多>>
相关作者:黄胜李爱珍胡福义范荣团李明祥更多>>
相关机构:中国科学院北京邮电大学东南大学清华大学更多>>
相关期刊:《东南大学学报(自然科学版)》《红外与毫米波学报》《真空科学与技术学报》《固体电子学研究与进展》更多>>
相关基金:国家自然科学基金国家重点基础研究发展计划云南省自然科学基金广东省自然科学基金更多>>
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Monolithic GaAs/Si V-groove depletion-type optical phase shifters integrated in a 300 mm Si photonics platform
《Photonics Research》2022年第6期1509-1516,共8页YOUNGHYUN KIM DIDIT YUDISTIRA BERNARDETTE KUNERT MARINA BARYSHNIKOVA REYNALD ALCOTTE CENK IBRAHIM OZDEMIR SANGHYEON KIM SEBASTIEN LARDENOIS PETER VERHEYEN JORIS VAN CAMPENHOUT MARIANNA PANTOUVAKI 
IMEC’s industry affiliation R&D program,National Research Foundation of Korea;Ministry of Science and ICT,South Korea(2021R1G1A1091912)。
We demonstrate monolithically integrated n-GaAs/p-Si depletion-type optical phase shifters fabricated on a 300 mm wafer-scale Si photonics platform.We measured the phase shifter performance using Mach–Zehnder modulat...
关键词:GAAS/SI MODULATOR optical 
基于MOCVD三步生长的GaAs/Si外延技术
《发光学报》2022年第2期153-160,共8页王嘉宾 王海珠 刘伟超 王曲惠 范杰 邹永刚 马晓辉 
吉林省科技发展计划(20210201089GX);重庆市自然科学基金(cstc2021jcyj-msxmX1060)资助项目。
在硅(Si)上外延生长高质量的砷化镓(GaAs)薄膜是实现硅基光源单片集成的关键因素。但是,Si材料与GaAs材料之间较大的晶格失配、热失配等问题对获得高质量的GaAs薄膜造成了严重影响。本文利用金属有机化学气相沉积(MOCVD)技术开展Si基GaA...
关键词:金属有机化学气相沉积 砷化镓  异质外延 
Fabrication of GaAs/SiO_(2)/Si and GaAs/Si heterointerfaces by surface-activated chemical bonding at room temperature
《Chinese Physics B》2021年第7期433-438,共6页Rui Huang Tian Lan Chong Li Jing Li Zhiyong Wang 
the National Natural Science Foundation of China(Grant Nos.61505003 and 61674140);the Beijing Education Commission Project(Grant No.SQKM201610005008);Beijing Postdoctoral Research Foundation(Grant No.2020-Z2-043)。
The room-temperature(RT)bonding mechanisms of Ga As/Si O_(2)/Si and Ga As/Si heterointerfaces fabricated by surface-activated bonding(SAB)are investigated using a focused ion beam(FIB)system,cross-sectional scanning t...
关键词:surface-activation bonding energy-dispersive x-ray spectroscopy intermix point defects 
GaAs/Si晶圆片键合偏差及影响因素研究被引量:2
《固体电子学研究与进展》2021年第1期10-13,40,共5页郭怀新 戴家赟 潘斌 周书同 孔月婵 陈堂胜 朱健 
国家自然科学基金资助项目(61904162)。
针对化合物半导体与Si基晶圆异质集成中的热失配问题,利用有限元分析方法开展GaAs半导体与Si晶片键合匹配偏差及影响因素研究,建立了101.6 mm(4英寸)GaAs/Si晶圆片键合匹配偏差评估的三维仿真模型,研究了不同键合结构和工艺对GaAs/Si晶...
关键词:GaAs/Si晶圆 晶圆键合 热失配 匹配偏差 
Defect Reduction in GaAs/Si Films with the a-Si Buffer Layer Grown by Metalorganic Chemical Vapor Deposition
《Chinese Physics Letters》2015年第8期165-168,共4页王俊 胡海洋 贺云瑞 邓灿 王琦 段晓峰 黄永清 任晓敏 
Supported by the Fund of State Key Laboratory of Information Photonics and Optical Communications of Beijing University of Posts and Telecommunications;the National Basic Research Program of China under Grant No 2010CB327601;the Natural Science Foundational Science and Technology Cooperation Projects under Grant No 2011RR000100;the 111 Project of China under Grant No B07005;the Doctoral Program of Higher Specialized Research Fund under Grant No 20130005130001
The growth of GaAs epilayers on silicon substrates with a thin amorphous silicon (a-Si) buffer layer by met- alorganic chemical vapor deposition is investigated in detail. Combining with the two-step growth method, ...
Defect reduction in GaAs/Si film with InAs quantum-dot dislocation filter grown by metalorganic chemical vapor deposition被引量:1
《Chinese Physics B》2015年第2期449-452,共4页王俊 胡海洋 邓灿 贺云瑞 王琦 段晓峰 黄永清 任晓敏 
supported by the Fundamental Research Funds for the Central Universities,China(Grant No.2013RC1205);the National Basic Research Program of China(Grant No.2010CB327601)
The growth of GaAs epilayers on silicon substrates with multiple layers of InAs quantum dots(QDs) as dislocation filters by metalorganic chemical vapor deposition(MOCVD) is investigated in detail.The growth condit...
关键词:GaAs-on-Si growth dislocation filter quantum dot 
A simulation-based proposed high-k heterostructure AlGaAs/Si junctionless n-type tunnel FET被引量:2
《Journal of Semiconductors》2014年第11期59-63,共5页Shiromani Balmukund Rahi Bahniman Ghosh Pranav Asthana 
We propose a heterostructure junctionless tunnel field effect transistor (HJL-TFET) using AIGaAs/Si. In the proposed HJL-TFET, low band gap silicon is used in the source side and higher band gap AlGaAs in the drain ...
关键词:band-to-band tunneling (BTBT) TFET heterostructure junctionless tunnel field effect transistor (HJL-TFET) ION/ION/IOFF ratio subthreshold slope VLSI 
GaAs/Si直接键合用GaAs表面化学活化技术被引量:1
《微纳电子技术》2014年第8期523-528,541,共7页马静 刘雯 杨添舒 时彦朋 杨富华 王晓东 
国家重点基础研究发展计划(973计划)资助项目(2012CB934204);国家自然科学基金资助项目(61076077;61274066)
研究了GaAs/Si疏水性直接键合技术中GaAs表面化学活化关键工艺,对比分析了不同体积分数的HF和HCl溶液作为表面活性处理剂时对GaAs表面进行活化处理的结果。发现用HCl和H2O溶液处理GaAs晶片得到的表面均方根粗糙度要优于用HF处理得到的结...
关键词:疏水性 直接键合 清洗工艺 原子力显微镜 表面均方根粗糙度 
Unintentional Doping Mechanisms in GaAs/Si Films Grown by Metalorganic Chemical Vapor Deposition
《Chinese Physics Letters》2013年第11期140-143,共4页WANG Jun DENG Can JIA Zhi-Gang WANG Yi-Fan WANG Qi HUANG Yong-Qing REN Xiao-Min 
Supported by the Fundamental Research Funds for the Central University under Grant No 2013RC1205;the National Basic Research Program of China under Grant No 2010CB327602。
To explain different doping effects in a buffer layer,thermally annealed interface,and upper epilayers of GaAs/Si films grown by Metalorganic Chemical Vapor Deposition(MOCVD),the behaviors of unintentional doping in G...
关键词:GAAS/SI MOCVD DOPING 
高效GaAs/Si叠层电池设计优化
《厦门大学学报(自然科学版)》2012年第4期798-801,共4页刘蕊 李欣 刘晶晶 陈松岩 李成 黄巍 
国家自然科学基金重点项目(60837001)
模拟一种高效GaAs/Si两结叠层电池结构,将硅材料作为叠层电池的一个底电池利用起来,拓展光谱吸收.分别讨论了隧穿结和子电池对叠层电池的影响,结果表明薄的GaAs隧穿结可以获得高效率的叠层电池,1.05μm厚的顶电池基区是子电池电流匹配...
关键词:模拟 GAAS/SI 叠层电池 隧穿结 电流匹配 
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