采用超低压(22×102Pa)选择区域生长(selective area growth,SAG)金属有机化学气相沉积(metal_organic chemical vapor deposition,MOCVD)技术成功制备了InGaAsP/InGaAsP级联电吸收调制器(electro absorption modulator,EAM)与分布反馈...
The compressively strained InGaAs/InGaAsP quantum well distributed feedback laser with ridge-wave- guide is fabricated at 1.74μm. It is grown by low-pressure metal organic chemical vapor deposition(MOCVD). A strain...