supported in part by the National"863"Program of China (No.2006AA04Z237);the Open Subject of State Key Laboratory of Modern Optical Instruments (No.200705)
A novel atomic force microscope (AFM) for large samples to be measured in liquid is developed. An innovative laser beam tracking system is proposed to eliminate the tracking and feedback errors. The open probe desig...
supported by the National "863" Program of China (No. 2006AA04Z237);the National Natural Science Foundation of China (No. 50775205)
We present a category of novel photothermal (PT) microactuators. Each microactuator consists of two PT arms that are jointed at the free end and connected to an anchor at the fixed end. When a laser beam irradiates ...
Supported by the National High Technology Research and Development Program of China (No. 2006AA04Z237);the National Natural Science Foundation of China (No. 50775205)
A novel asymmetric optothermal microactuator was developed. A microactuator of 750μm length was machined by an excimer laser micmmachining system using single layer material. It had an asymmetric structure consisting...