Project(50875257) supported by the National Natural Science Foundation of China
The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone t...
supported by the Canada Foundation for Innovation (CFI) and the National Natural Science Foundation of China (Grant No.50875257)
This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties. As an inner-loop, a disturbance observer (DOB) is ...