Partially supported by the National Natural Sciences Foundation of China (No.10075072)
Thin strain-relaxed Si0.81Ge0.19 films (95 nm) on the Ar+ ion implanted Si substrates with different ener- gies (30 keV,40 keV and 60 keV) at the same implanted dose (3×1015cm-2) were grown by ultra high vacuum chemi...