supported by the National Natural Science Foundation of China (U21A20496,61922060,62205235,62204157,61805172,12104334,62174117,and 61905173);the Graduate Innovation Project of Shanxi Province (2020BY117);the Key Research and Development (International Cooperation)Program of Shanxi Province (201803D421044);the Natural Science Foundation of Shanxi Province (20210302123154 and 20210302123169);Research Project Supported by Shanxi Scholarship Council of China (2021-033);Research Project Supported by Shanxi-Zheda Institute of Advanced Materials and Chemical Engineering (2021SX-FR008 and 2022SX-TD020);Introduction of Talents Special Project of Lvliang City (Rc2020206,Rc2020207);Transformation Cultivation Project of University Scientific and Technological Achievements of Shanxi Province (2020CG013);the Key Research and Development Program of Shanxi Province (202102150101007);the support from the Research Grants Council,University Grants Committee,Hong Kong,General Research Fund (12303920);SZ-HK-Macao Science and Technology Plan Project (SGDX2020110309540000);Guangdong Basic and Applied Basic Research Fund (2022A1515010020)。
supported by the Science and Technology Foundation of Shanghai(19JC1412402 and 20JC1415600);the National Natural Science Foundation of China(62074111);Shanghai Municipal Science and Technology Major Project(2021SHZDZX0100);Shanghai Municipal Commission of Science and Technology Project(19511132101);the support of the Fundamental Research Funds for the Central Universities。
supported by the National Natural Science Foundation of China(62125404,62004193,61922077,12274456,92163206,51991342,and 11874347);the Strategic Priority Research Program of Chinese Academy of Sciences(XDB43000000);the Guangdong Major Project of Basic and Applied Basic Research(2021B0301030002);the National Key R&D Program of China(2021YFA1400502 and 2022YFA1405600);supported by the Youth Innovation Promotion Association of Chinese Academy of Sciences(Y2021042);the Nanofabrication Laboratory in the National Centre for Nanoscience and Technology for the electron beam lithography。