Project supported by the Key Program of the National Natural Science Foundation of China(No.61334001);the National Natural Science Foundation of China(No.51072076);the National High Technology Research and Development Program of China(Nos.2011AA03A101,2012AA041002);the National Key Technology Research and Development Program of China(No.2011BAE32B01);the Fund for Less Developed Regions of the National Natural Science Foundation of China(No.11364034)
The unintentional carbon doping concentration of GaN films grown by low pressure metal organic chemical vapor deposition (LP-MOCVD) depends strongly on the growth rate. The concentration of carbon is varied from 2.9...