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国家自然科学基金(10635010): 作品数：23被引量：25H指数：3; 导出分析报告; 相关作者：辛煜王友年黄晓江刘永新蒋相站更多>>; 相关机构：苏州大学大连理工大学中国科学技术大学新疆工业高等专科学校更多>>; 相关期刊：《科学技术与工程》《Chinese Physics B》《物理学报》《Plasma Science and Technology》更多>>; 相关主题：DUAL-FREQUENCYPLASMAPLASMAS等离子体F更多>>; 相关领域：理学电子电信一般工业技术核科学技术更多>>

低频频率和O_2含量对双频容性耦合等离子体Ar-O_2放电的影响: 《科学技术与工程》2014年第1期41-44,58,共5页蒋相站张季李文亮姚洪斌刘永新刘佳; 国家自然科学基金重点项目(10635010);新疆工程学院科研基金(2011XGZ091312)资助; 利用四极杆质谱仪研究了Ar/O2混合气体放电中低频频率和O2含量对离子能量分布和平均能量的影响。研究结果表明当低频频率增大时,离子能量逐渐由中频机制向高频机制变化,其能量分布的马鞍型双峰结构逐渐收缩,变得不明显。Ar+离子由于共...; 关键词：双频容性耦合等离子体四极杆质谱离子能量分布平均能量

Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas被引量：1: 《Plasma Science and Technology》2013年第6期511-515,共5页陆文琪蒋相站刘永新杨烁张权治李小松徐勇朱爱民王友年; supported by National Natural Science Foundation of China(No.10635010);the Specialized Research Fund for the Doctoral Program of Higher Education of China(No.20090041110026); The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency（RF） choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,a...; 关键词：dual-frequency capacitive plasma double probe plasma diagnosis

双频容性耦合等离子体密度径向均匀性研究被引量：4: 《物理学报》2012年第1期276-282,共7页蒋相站刘永新毕振华陆文琪王友年; 国家自然科学基金重点项目(批准号:10635010)资助的课题~~; 利用自主研制的全悬浮双探针,对影响双频容性耦合等离子体径向均匀性的因素进行了研究.发现低频功率、放电气压和放电间距对径向均匀性有明显影响.合适的低频功率、放电气压及较大的极板间距可以得到更均匀的等离子体.采用与实验相同的...; 关键词：双频容性耦合等离子体径向均匀性全悬浮双探针二维流体模型

MHD Equilibrium Configuration Reconstructions for HL-2A Tokamak: 《Plasma Science and Technology》2011年第4期424-430,共7页何志雄董家齐何宏达蒋海滨高喆张锦华; supported by National Natural Science Foundation of China(No.10635010);Specialized Research Fund for the Doctoral Program of Higher Education of China(No.20090041110026); The EFIT （Equilibrium Fitting） code is modified for the equilibrium configuration reconstruction in HL-2A. Signals from Langmuir probe （LP） at the divertor target plates are employed in the reconstruction of diver...; 关键词：equilibrium reconstruction MHD equilibrium LP signals HL-2A tokamak

退火温度对用PⅢ方法制备共掺杂p型ZnO薄膜结构和性能的影响被引量：2: 《苏州大学学报（自然科学版）》2011年第1期52-57,共6页杜记龙江美福张树宇王培君辛煜; 国家自然科学基金(10635010); 采用射频磁控共溅射的方法制备出ZnO:Al薄膜,以NO和O2为源气体(V(O2)/V(O2+NO)=75%),采用等离子体浸没离子注入(PⅢ)方法对薄膜进行注入得到ZnO:Al:N薄膜,注入剂量为2.23×1015 cm-2,并在N2氛围下对样品进行了不同温度的退火处理.通过XR...; 关键词：等离子体浸没离子注入 p-ZnO 磁控溅射共掺杂

Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas: 《Plasma Science and Technology》2011年第2期181-187,共7页毕振华徐翔刘永新蒋相占陆文琪王友年; supported by National Natural Science Foundation of China (No. 10635010);Specialized Research Fund for the Doctoral Program of Higher Education of China (No.20090041110026); A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency （DF） capacitively coupled plasma （CCP） discharge based on the geometry of real device. Given the experimental p...; 关键词：DF CCP hybrid model floating double probe IEDF IADF

反应磁控溅射法制备的氟化类金刚石薄膜摩擦特性的研究被引量：1: 《苏州大学学报（自然科学版）》2010年第2期66-72,共7页王培君江美福辛煜杜记龙戴永丰; 国家自然科学基金(10635010); 以高纯石墨做靶、CHF3/Ar为源气体采用磁控溅射法在不同射频功率条件下制备了氟化类金刚石(F-DLC)薄膜.利用原子力显微镜、纳米压痕、拉曼光谱、红外光谱和摩擦磨损测试仪对薄膜的表面形貌、硬度、键态结构以及摩擦学性能作了具体分析....; 关键词：摩擦性能射频输入功率反应磁控溅射氟化类金刚石薄膜

Structural evolution of silicone oil liquid exposed to Ar plasma: 《Chinese Physics B》2010年第6期404-408,共5页袁圆叶超黄宏伟施国峰宁兆元; Project supported by the National Natural Science Foundation of China (Grant Nos.10975105,10575074 and 10635010); Structure properties of silicone oil serving as a liquid substrate exposed to Ar plasma axe investigated in this paper. Under the action of energetic Ar ions, the surface of silicone oil liquid substrate exhibits a br...; 关键词：silicone oil liquid substrate structure evolution Ar plasma

Formation of SiC Nanostruture Using Hexamethyldisiloxane During Plasma-Assisted Hot-Filament Chemical Vapor Deposition: 《Plasma Science and Technology》2010年第5期547-550,共4页陈牧笛朱晓东柯博丁芳温晓辉周海洋; supported by National Natural Science Foundation of China (No.10635010);the Key National Basic Research Program of China (No.2008CB717800); Growth of SiC nanowires in plasma-assisted hot filament chemical-vapor-deposition by using hexamethyldisiloxane （HMDSO） as the gas source is reported. The SiC nanowires （SIC NWs） grew on Au-coated silicon substrat...; 关键词：SIC NANOWIRES plasma

Effect of Low-frequency Power on F, CF_2 Relative Density and F/CF_2 Ratio in Fluorocarbon Dual-Frequency Plasmas被引量：1: 《Plasma Science and Technology》2010年第5期566-570,共5页黄宏伟叶超徐轶君袁圆施国峰宁兆元; supported by National Natural Science Foundation of China (Nos.10975105, 10575074, 10635010); Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical e...; 关键词：fluorocarbon plasma dual-frequency discharge low-k films etching

国家自然科学基金(10635010)