supported by the Hi-Tech Research and Development Program of China(Grant No.2013AA050302);the National Natural Science Foundation of China(Grant No.61474065);Tianjin Municipal Research Key Program of Application Foundation and Advanced Technology,China(Grant No.15JCZDJC31300);the Key Project in the Science&Technology Pillar Program of Jiangsu Province,China(Grant No.BE2014147-3);the Specialized Research Fund for the Ph.D.Program of Higher Education,China(Grant No.20120031110039)
Phosphorous-doped hydrogenated nanocrystalline silicon oxide (n-nc-SiOx:H) films are prepared via radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). Increasing deposition power during n-nc-SiOx...
Project supported by the Key Basic Research Project of Hebei Province,China(Grant No.12963930D);the Natural Science Foundation of Hebei Province,China(Grant Nos.F2013201250 and B2012402011)
By using the plasma enhanced chemical vapor deposition(PECVD) technique, amorphous silicon oxide films containing nanocrystalline silicon grain(nc-Si O x:H) are deposited, and the bonding configurations and optic...
Supported by the Key Basic Research Project of Hebei Province under Grant No 12963930D;the Natural Science Foundation of Hebei Province under Grant No F2013201250;the Science and Technology Research Projects of the Educational Department of Hebei Province under Grant No ZH2012030
Silicon oxide films containing nanocrystalline silicon (nc-SiOx:H) are deposited by co-sputtering technology at low temperatures (〈400℃) that are much lower than the typical growth temperature of nc-Si in SiO2....
supported by the Key Basic Research Project of Hebei Province,China(Grant No.12963930D);the Natural Science Foundation of Hebei Province,China(Grant No.F2013201250);the Science and Technology Research Projects of the Educational Department of Hebei Province,China(Grant No.ZH2012030)
Amorphous silicon oxide containing nanocrystalline silicon grain(nc-SiOx:H) films are prepared by a plasmaenhanced chemical vapor deposition technique at different negative substrate bias voltages.The influence of ...