the National Natural Science Foundation of China(No.60873130);the"863"National High-Tech Research andDevelopment Program of China(No.2007AA01Z319);the Shanghai's Key Discipline Development Program(No.J50104);InnovationFoundation for Graduate Student of Shanghai University(No.06820113)
光刻仿真是SOC(System On Chip)光刻工艺的重要环节,为了实现仿真数据3D可视化,在光刻仿真程序SPLAT(Simulation of Projection Lens Aberrations via TCCs)基础上,提出了自动排序算法对SPLAT输出数据进行重新排列以便三维建模,建立了...