Supported by the National High Technology Research and Development Program of China (Grant No. 2004AA311030);State Key Program of Basic Research of China (973) (Grant No. 20000683-02);Beijing Municipal Education Commission (Grant No. 2002kj018, Grant No. kz200510005003);Beijing Municipal Science and Technology Commission (Grant No. D0404003040221)
An ultraviolet (UV) laser lift-off (LLO) technique was presented to form a roughened surface morphol-ogy on GaN membrane grown by metalorganic chemical vapor deposition (MOCVD). The etched sur-face showed cone-like st...