Y2002-63436-42 0319779溅射薄膜特性与溅射工艺参数的关系=Relationshipsamong pruperties of sputtered thin films and sputteringprocess parameters[会,英]/Kolar M.& Mach,P.//2001 IEEE Internatiortal Spring Seminar on Electr...
Y2002-63354-181 0314346微波频率下硅上低损有机微机械加工互连的开发=Development of low loss organic-micromachined intercon-nects on silicon at microwave frequencies[会,英]/Newl-in.D.& Pham,A.//2001 IEEE Radio and Wirele...
Y2002-63234-211 0300356采用反向工艺序列的低成本高可靠性 CMOS 工艺=Low cost and high reliability CMOS technologies,by"retro process sequence"[会,英]/Sekikawa,N.& An-do,W.//2001 IEEE Intemational Symposium on Semi-condu...