supported by the National Natural Science Foundation of China (Grant No. 51141002);the Fundamental Research Funds for the Central Universities (B1020270);Natural Science Foundation of Jiangsu Province of China (Grant No. BK2010521)
In this paper,an InGaN metal-insulator-semiconductor(MIS) photodetector with an ultra-thin Al2O3 insulation layer deposited by atomic layer deposition(ALD) was studied.A high photoelectric responsivity of 0.25 A/W and...