supported by the National Key R&D Program of China(No.2022YFE0140100);the National Natural Science Foundation of China(Nos.52273271 and 62321004);partly supported by the Key R&D Program of Guangdong Province(No.2020B01074003)。
In the present work,the high uniform 6-inch single-crystalline AlN template is successfully achieved by high temperature annealing technique,which opens up the path towards industrial application in power device.Moreo...