A non-micro-air-bridge InP-based heterojunction bipolar transistor (HBT) is fabricated. A very small emitter side etching (〈100nm) is developed and makes a submicron InP-based HBT possible. The current gain cutof...
PolYimide passivation and planarization process techniques for high speed InP/InGaAs single heterojunction bipolar transistors (SHBTS) are developed. A maximum extrapolated ft of 210GHz is achieved for the SHBT with...