云南高校图书馆联盟文献共享服务平台- 上海市科委纳米专项基金(0452nm051)

上海市科委纳米专项基金(0452nm051): 作品数：20被引量：39H指数：4; 导出分析报告; 相关作者：王林军夏义本苏青峰史伟民刘健敏更多>>; 相关机构：上海大学更多>>; 相关期刊：《红外与毫米波学报》《无机材料学报》《核电子学与探测技术》《物理学报》更多>>; 相关主题：金刚石薄膜性能研究CVD金刚石膜表面粗糙度HFCVD更多>>; 相关领域：理学电子电信一般工业技术核科学技术更多>>

等离子平板显示中冷阴极纳米金刚石膜的制备(英文): 《电子器件》2008年第1期72-76,共5页祝雪丰王林军胡广刘建敏黄建徐金勇夏义本; the National Natural Science Foundation of China (60577040);Shanghai Foundation of Applied Materials Research and Development (0404);Nano-technology project of Shanghai (0452nm051,0552nm046);Shanghai Leading Academic Disciplines (T0101) .; 讨论大面积4cm×4cm纳米金刚石膜制备工艺.采用电子辅助-热丝化学气相沉积法(EA-HFCVD)在硅片上沉积纳米金刚石膜.生长过程中,预先加6安培偏流生长1小时,然后在0.8千帕条件下,无偏流生长3小时.原子力镜表征晶粒尺寸为30纳米.样品上任意...; 关键词：纳米金刚石膜高γ 透过率电子辅助-热丝化学气相沉积法(EA-HFCVD)

EA-HFCVD沉积纳米金刚石膜的光致发光分析(英文): 《液晶与显示》2007年第5期529-534,共6页祝雪丰王林军胡广刘健敏黄健徐金勇夏义本; Supported by National Natural Science Foundation of China (No .60577040) ;Shanghai Foundation of Applied Ma-terials Research and Development ( No .0404) ;Nano-technology Project of Shanghai ( No .0452nm051 , No .0552nm046) ;Shanghai Leading Academic Disciplines (No .T0101); 采用电子辅助-热丝化学气相沉积法(EA-HFCVD)在硅片上沉积出晶粒尺寸为30nm的均匀金刚石膜。生长过程中,预先加6A偏流生长1h,然后在0.8kPa条件下,无偏流生长3h。光致发光谱中存在4个发光中心分别位于1.682eV,1,564eV,1,518eV和1.512eV...; 关键词：光致发光纳米金刚石膜电子辅助-热丝化学气相沉积

纳米光学金刚石薄膜的分析与改进(英文)被引量：1: 《液晶与显示》2007年第5期548-552,共5页胡广王林军祝雪丰刘建民黄健徐金勇夏义本; Supported by National Natural Science Foundation of China (No .60577040);Shanghai Foundation of Applied Ma-terials Research and Development ( No .0404); Nano-technology Project of Shanghai ( No .0452nm051 , No .0552nm046);Shanghai Leading Academic Disciplines (No .T0101); 由于极其优良的热学和光学性能,纳米金刚石薄膜极有可能应用于背投电视的激光光学窗口。文章通过在热丝辅助化学气相沉积法中采用偏压增强成核(BEN-HFCVD) ,成功地在(100)硅衬底上制得了适于作为光学窗口的高质量的光学级纳米金刚石薄膜...; 关键词：纳米金刚石光学性质表面粗糙度偏压增强成核-热丝辅助化学气相沉积法

CVD金刚石膜X射线探测器的研制及性能研究被引量：4: 《核电子学与探测技术》2006年第5期669-672,共4页刘健敏夏义本王林军张明龙苏青峰史伟民; 国家自然科学基金(60277024);上海市纳米专项(0452nm051);上海应用材料研究与发展资助;上海市重点学科(T0101)资助; 金刚石以其独特的性能成为辐射探测器的理想材料。采用HFCVD方法制备了高质量、(100)取向的CVD金刚石膜,在此基础上研制出X射线探测器。使用55Fe 5.9keV X射线研究了CVD金刚石膜探测器的光电流和电荷收集效率。结果表明,探测器在偏压加...; 关键词：CVD金刚石膜 X射线探测器光电流电荷收集效率

用于高频声表面波器件的CVD金刚石衬底的研究被引量：1: 《材料科学与工艺》2006年第4期408-411,共4页刘健敏夏义本王林军阮建锋苏青峰蒋丽雯史伟民; 国家自然科学基金资助项目(60277024);上海市纳米专项资助项目(0452nm051);上海应用材料研究与发展基金资助项目(0404);上海市重点学科赞助项目(T0101); 使用纳米金刚石粉研磨工艺预处理硅片衬底抛光面,在低气压成核的条件下,以丙酮和氢气为反应物,采用传统的热丝辅助化学气相沉积法,制备了自支撑金刚石膜;通过射频磁控溅射法沉积氧化锌薄膜在自支撑金刚石膜的成核面,形成氧化锌/自支撑...; 关键词：自支撑金刚石膜表面粗糙度氧化锌薄膜声表面波器件

晶粒尺寸对CVD金刚石膜电学特性的影响被引量：1: 《功能材料与器件学报》2006年第4期275-279,共5页崔江涛王林军苏青峰阮建锋蒋丽雯史伟民夏义本; 国家自然科学基金(No.60577040);上海应用材料研究与发展基金(No.0404);上海市纳米专项(No.0452nm051);上海市教育委员会"材料学"重点学科赞助上海市重点学科(T0101)资助; 通过改变生长参数,采用热丝化学气相沉积(HFCVD)法制备了从10μm到90nm四种晶粒尺寸的金刚石膜,并制作了三明治结构的光电导探测器。采用原子力显微镜和拉曼光谱仪研究了薄膜的结构和表面形貌:表面粗糙度从423nm变化到15nm;晶粒越大,金...; 关键词：金刚石膜电学特性晶粒尺寸 HFCVD

Ellipsometric analysis and optical absorption characterization of nano-crystalline diamond film: 《中国有色金属学会会刊：英文版》2006年第B01期289-292,共4页王林军蒋丽雯任玲刘健敏苏青峰徐闰彭鸿雁史伟民夏义本; Project(60577040) supported by the National Natural Science Foundation of China; Project(0404) supported by Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project(T0101) supported by Shanghai Leading Academic Disciplines; A nano-crystalline diamond (NCD) film with a smooth surface was successfully deposited on silicon by a hot filament chemical vapor deposition (HFCVD) method. Scanning electron microscopy (SEM), atomic force microscopy...; 关键词：纳米晶金刚石膜椭圆偏光分析光学吸收特性化学汽相淀积

Preparation of free-standing diamond films for high frequency SAW devices: 《中国有色金属学会会刊：英文版》2006年第B01期298-301,共4页刘健敏夏义本王林军苏青峰赵平徐闰彭鸿雁史伟民; Projects(60577040) supported by the National Natural Science Foundation of China; Project(0404) supported by the Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project(T0101) supported by the Shanghai Leading Academic Disciplines; Free-standing diamond films were prepared by hot filament chemical vapor deposition (HFCVD) method under different conditions. Inter-digital transducers (IDTs) were formed on the nucleation sides of free-standing diam...; 关键词：自立金刚石膜化学汽相淀积 HFCVD 高频声表面波器件 ZNO

Effect of working pressure and temperature on ZnO film deposited on free-standing diamond substrates: 《中国有色金属学会会刊：英文版》2006年第B01期302-305,共4页赵平夏义本王林军刘健敏徐闰彭鸿雁史伟民; Project (60577040) supported by the National Natural Science Foundation of China; Project (0404) supported by the Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project (T0101) supported by the Shanghai Leading Academic Disciplines; The structure characteristic and electric performance of ZnO film deposited on nucleation side of free-standing diamond substrates under different heating temperatures (Th) of substrate and working pressures (p) were ...; 关键词：氧化锌薄膜沉积加工压力加工温度自立金刚石衬底声表面波器件

Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment: 《中国有色金属学会会刊：英文版》2006年第B01期310-312,共3页赵平夏义本王林军刘健敏徐闰彭鸿雁史伟民; Project(60577040) supported by the National Natural Science Foundation of China; Project(0404) supported by Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project(T0101) supported by Shanghai Leading Academic Disciplines; The room-temperature oxygen plasma treatment before depositing ZnO films on nanocrystalline diamond substrates was studied. The nanocrystalline diamond substrates were pretreated in oxygen plasma at 50 W for 30 min at...; 关键词：氧化锌薄膜室温氧等离子体预处理性能改进纳米晶金刚石膜声表面波器件

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