GaN buffer layers (thickness ~60nm) grown on GaAs(001) by low-temperature MOCVD are investigated by X-ray diffraction pole figure measurements using synchrotron radiation in order to understand the heteroepitaxial gr...
the National Natural Science Foundation of China(Grant No.69825107,NSFC-RGC Joint program:NSFC5001161953 and N_HKU028/00)
In this paper we propose a new method for measuring the thickness of the GaN epilayer, by using the ratio of the integrated intensity of the GaN epilayer X-ray diffraction peaks to that of the sapphire substrate ones....
This work was supported by the National Natural Science Foundation of China (Grant No. 69825107), NSFC-RGC Joint Program (Grant Nos. NSFC5001161953 and N_HKU028/00).
The crystallographic tilt in GaN layers grown by epitaxial lateral overgrowth (ELO) onsapphire (0001) substrates was investigated by using double crystal X-ray diffraction (DC-XRD). Itwas found that ELO GaN stripes be...