We propose and fabricate an A1GaN/GaN high electron mobility transistor (HEMT) on sapphire substrate using a new kind of electron beam (EB) lithography layout for the T-gate. Using this new layout,we can change th...
Silicon crystal-facet-dependent nanostructures have been successfully fabricated on a (100)-oriented silicon-oninsulator wafer using electron-beam lithography and the silicon anisotropic wet etching technique. This ...