Project supported by the National Natural Science Foundation of China (Grant Nos. 60976068 and 61076097);the Cultivation Fund of the Key Scientific and Technical Innovation Project of the Ministry of Education of China (Grant No. 708083)
HfO2 films are deposited by atomic layer deposition(ALD) using tetrakis ethylmethylamino hafnium(TEMAH) as the hafnium precursor,while O3 or H2O is used as the oxygen precursor.After annealing at 500℃ in nitrogen...
Project supported by the National Natural Science Foundation of China (Grant Nos. 60976068 and 61076097);the Cultivation Fund of the Key Scientific and Technical Innovation Project,Ministry of Education of China (Grant No. 708083)
A comparative study of two kinds of oxidants(H2O and O3) with the combinations of two metal precursors [trimethylaluminum(TMA) and tetrakis(ethylmethylamino) hafnium(TEMAH)] for atomic layer deposition(ALD) ...