Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter e...
A 1.55μm Fabry-Perot (F-P) thermo-optical t unable filter is fabricated.The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique.Due to the excellent thermo-optical property o...